JPH02102461U - - Google Patents

Info

Publication number
JPH02102461U
JPH02102461U JP1108889U JP1108889U JPH02102461U JP H02102461 U JPH02102461 U JP H02102461U JP 1108889 U JP1108889 U JP 1108889U JP 1108889 U JP1108889 U JP 1108889U JP H02102461 U JPH02102461 U JP H02102461U
Authority
JP
Japan
Prior art keywords
utility
model registration
shutter
thin film
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1108889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1108889U priority Critical patent/JPH02102461U/ja
Publication of JPH02102461U publication Critical patent/JPH02102461U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1108889U 1989-01-31 1989-01-31 Pending JPH02102461U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1108889U JPH02102461U (en]) 1989-01-31 1989-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1108889U JPH02102461U (en]) 1989-01-31 1989-01-31

Publications (1)

Publication Number Publication Date
JPH02102461U true JPH02102461U (en]) 1990-08-15

Family

ID=31219331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1108889U Pending JPH02102461U (en]) 1989-01-31 1989-01-31

Country Status (1)

Country Link
JP (1) JPH02102461U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002129326A (ja) * 2000-10-31 2002-05-09 Anelva Corp 基板加熱機構付シャッタを有する成膜装置及び成膜方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002129326A (ja) * 2000-10-31 2002-05-09 Anelva Corp 基板加熱機構付シャッタを有する成膜装置及び成膜方法

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